Excimer laser technology

Dirk Basting, Gerd Marowsky3540200568, 9783540200567, 9783540266679

This comprehensive survey on Excimer Lasers investigates the current range of the technology, applications and devices of this commonly used laser source, as well as the future of new technologies, such as F2 laser technology.
Additional chapters on optics, devices and laser systems complete this compact handbook.
A must read for laser technology students, process application researchers, engineers or anyone interested in excimer laser technology. An effective and understandable introduction to the current and future status of excimer laser technology.

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Table of contents :
Preliminaries……Page 1
Contents……Page 6
1 Introduction……Page 18
2 Some Fundamentals of Laser Physics……Page 50
3 Principles of Excimer Lasers……Page 58
4 Design and Technology of Excimer Lasers……Page 64
5 Specially Designed Excimer Lasers……Page 92
6 Excimer Lasers for Microlithography……Page 106
7 Laser Beam Characterization……Page 122
8 Optical Coatings for Excimer Laser Applications……Page 136
9 Small Structures with Large Excimer Lasers……Page 144
10 Overview……Page 156
11 Ablative Micro Fabrication……Page 166
12 Micro Processing of Borosilicate Glass and Polymers……Page 218
13 F2 Laser Microfabrication for Photonics and Biophotonics……Page 238
14 Nano Structuring with Femtosecond Excimer Laser Pulses……Page 296
15 Physical Aspects of Ultra Fast UV Laser Transfer……Page 302
16 Material Modification……Page 312
17 Excimer Laser Assisted Deposition of Carbon and Boron Nitride Based High Temperature Superconducting Films……Page 352
18 Combustion Analysis……Page 368
19 Medical Applications of Excimer Lasers……Page 378
20 High Intensity Applications of Excimer Lasers……Page 390
21 High Repetition Rate Applications of Excimer Lasers……Page 402
22 New Frontiers Extreme Ultraviolet EUV Technology at 13.5nm……Page 416
References……Page 438
List of Abbreviations……Page 440
Index……Page 444