Principles of Plasma Discharges and Materials Processing

Michael A. Lieberman, Alan J. Lichtenberg0-471-72001-1, 9780471720010

In this second edition of a work for graduate students and researchers in plasma processing, Lieberman and Lichtenberg, both professors of electrical engineering at the University of California-Berkeley, add new and revised material to reflect developments in the field and to clarify the presentation of basic principles. They cover fundamentals of plasma physics and chemistry, and apply basic theory to plasma discharges. New and expanded topics in this edition include general Bohm criteria, pulsed power discharges, and helicon discharges.