54.Semiconductor Manufacturing

John G. Webster (Editor)

Table of contents :
Local Disk……Page 0
54• Semiconductor Manufacturing……Page 1
Abstract……Page 3
Artificial Intelligence in Semiconductor Manufacturing……Page 5
Abstract……Page 38
Chemical Vapor Deposition……Page 39
Abstract……Page 48
Diagnosis of Semiconductor Processes……Page 49
Abstract……Page 62
Electron-Beam Lithography……Page 63
Abstract……Page 72
Electron Beam Processing……Page 73
Abstract……Page 84
Epitaxial Liftoff……Page 85
Abstract……Page 89
Flexible Semiconductor Manufacturing……Page 90
Abstract……Page 103
Focused Ion Beams in Semiconductor Manufacturing……Page 104
Abstract……Page 124
Fuzzy Logic for Semiconductor Manufacturing……Page 125
Abstract……Page 130
Gate and Tunnel Dielectrics, Manufacturing Aspects……Page 131
Abstract……Page 138
Ion Implantation……Page 139
Abstract……Page 151
Isolation Technology……Page 152
Abstract……Page 160
MIS, MIM, and MSM Structures……Page 161
Abstract……Page 184
Narrow Band Gap Semiconductors……Page 185
Abstract……Page 189
Photolithography……Page 190
Abstract……Page 211
Semiconductor Device Manufacture Yield and Reliability Modeling……Page 212
Abstract……Page 238
Semiconductor Doping……Page 240
Abstract……Page 253
Semiconductor Factory Control and Optimization……Page 255
Abstract……Page 283
Semiconductor Manufacturing Scheduling……Page 284
Abstract……Page 294
Semiconductor Manufacturing Test Structures……Page 295
Abstract……Page 304
Semiconductor Process Representation……Page 305
Abstract……Page 314
Sputter Deposition……Page 315
Abstract……Page 324
Statistical Methods for Semiconductor Manufacturing……Page 325
Abstract……Page 342
Time Interval Measurement……Page 343
Abstract……Page 355
Wafer-Scale Integration……Page 356
Abstract……Page 373
X-Ray Lithography……Page 374