Handbook of plasma processing technology: fundamentals, etching, deposition, and surface interactions

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Series: Materials science and process technology series

ISBN: 0815512201, 9780815512202, 9780815517634

Size: 5 MB (5224391 bytes)

Pages: 535/535

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Stephen M. Rossnagel, William D. Westwood, Jerome J. Haber0815512201, 9780815512202, 9780815517634

This is a comprehensive overview of the technology of plasma-based processing, written by an outstanding group of 29 contributors.

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