Hydrogen in Semiconductors

Jacques I. Pankove and Noble M. Johnson (Eds.)0127521348, 9780127521343

Hydrogen plays an important role in silicon technology, having a profound effect on a wide range of properties. Thus, the study of hydrogen in semiconductors has received much attention from an interdisciplinary assortment of researchers. This sixteen-chapter volume provides a comprehensive review of the field, including a discussion of hydrogenation methods, the use of hydrogen to passivate defects, the use of hydrogen to neutralize deep levels, shallow acceptors and shallow donors in silicon, vibrational spectroscopy, and hydrogen-induced defects in silicon. In addition to this detailed coverage of hydrogen in silicon, chapters are provided that discuss hydrogen-related phenomena in germanium and the neutralization of defects and dopants in III*b1V semiconductors. Provides the most in-depth coverage of hydrogen in silicon available in a single source**Includes an extensive chapter on the neutralization of defects in III*b1V semiconductors**Combines both experimental and theoretical studies to form a comprehensive reference

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Table of contents :
Content:
Edited by
Page iii

Copyright page
Page iv

List of Contributors
Pages xi-xii

Preface
Page xiii
J.I. Pankove, N.M. Johnson

Chapter 1 Introduction to Hydrogen in Semiconductors Original Research Article
Pages 1-15
J.I. Pankove, N.M. Johnson

Chapter 2 Hydrogenation Methods Original Research Article
Pages 17-33
Carleton H. Seager

Chapter 3 Hydrogenation of Defects in Crystalline Silicon Original Research Article
Pages 35-47
Jacques I. Pankove

Chapter 4 Hydrogen Passivation of Damage Centers in Semiconductors Original Research Article
Pages 49-64
James W. Corbett, Péter Deák, Uroš V. Desnica, Stephen J. Pearton

Chapter 5 Neutralization of Deep Levels in Silicon Original Research Article
Pages 65-89
S.J. Pearton

Chapter 6 Neutralization of Shallow Acceptors in Silicon Original Research Article
Pages 91-111
Jacques I. Pankove

Chapter 7 Neutralization of Donor Dopants and Formation of Hydrogen-Induced Defects in n-Type Silicon Original Research Article
Pages 113-137
N.M. Johnson

Chapter 8 Vibrational Spectroscopy of Hydrogen-Related Defects in Silicon Original Research Article
Pages 139-183
Michael Stavola, S.J. Pearton

Chapter 9 Hydrogen in Semiconductors: Ion Beam Techniques Original Research Article
Pages 185-224
A.D. Marwick

Chapter 10 Hydrogen Migration and Solubility in Silicon Original Research Article
Pages 225-350
Conyers Herring, N.M. Johnson

Chapter 11 Hydrogen-Related Phenomena in Crystalline Germanium Original Research Article
Pages 351-380
Eugene E. Haller

Chapter 12 Hydrogen Diffusion in Amorphous Silicon Original Research Article
Pages 381-445
James Kakalios

Chapter 13 Neutralization of Defects and Dopants in III-V Semiconductors Original Research Article
Pages 447-510
J. Chevallier, B. Clerjaud, B. Pajot

Chapter 14 Computational Studies of Hydrogen-Containing Complexes in Semiconductors Original Research Article
Pages 511-546
Gary G. DeLeo, W. Beall Fowler

Chapter 15 Muonium in Semiconductors Original Research Article
Pages 547-584
R.F. Kiefl, T.L. Estle

Chapter 16 Theory of Isolated Interstitial Hydrogen and Muonium in Crystalline Semiconductors Original Research Article
Pages 585-622
Chris G. Van de Walle

Index
Pages 623-629