Microlithography · Molecular Imprinting: -/-

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Edition: 1

Series: Advances in polymer science 172

ISBN: 9783540218623, 3-540-21862-9

Size: 4 MB (4547095 bytes)

Pages: 276/281

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Jean Daniel Marty, Monique Mauzac (auth.)9783540218623, 3-540-21862-9

Content: Molecular imprinting : state of the art and perspectives / J.D. Marty, M. Mauzac — Chemical amplification resists for microlithography / H. Ito

Table of contents :
Molecular Imprinting: State of the Art and Perspectives….Pages 1-35
Chemical Amplification Resists for Microlithography….Pages 37-245

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