Principles and Applications of NanoMEMS Physics

Héctor J. De Los Santos (auth.)9781402032387, 1-4020-3238-2

Principles and Applications of NanoMEMS Physics presents the first unified exposition of the physical principles at the heart of NanoMEMS-based devices and applications. In particular, after beginning with a comprehensive presentation of the fundamentals and limitations of nanotechnology and MEMS fabrication techniques, the book addresses the physics germane to this dimensional regime, namely, quantum wave-particle phenomena, including, the manifestation of charge discreteness, quantized electrostatic actuation, and the Casimir effect, and quantum wave phenomena, including, quantized electrical conductance, quantum interference, Luttinger liquids, quantum entanglement, superconductivity and cavity quantum electrodynamics. Potential building blocks are also addressed for NanoMEMS applications, including, nanoelectromechanical quantum circuits and systems such as charge detectors, the which-path electron interferometer, and the Casimir oscillator, as well as a number of quantum computing implementation paradigms. Finally, NanoMEMS applications in photonics are addressed, including nanophotonic light sources and plasmonic devices.

Table of contents :
Nanoelectromechanical Systems….Pages 1-39
Nanomes Physics: Quantum Wave-Particle Phenomena….Pages 41-77
Nanomems Physics: Quantum Wave Phenomena….Pages 79-148
Nanomems Applications: Circuits and Systems….Pages 149-191
Nanomems Applications: Photonics….Pages 193-211