Vacuum ultraviolet spectroscopy

James A. Samson, David L. Ederer0126175608, 9780126175608

Techniques of Vacuum Ultraviolet Spectroscopy was first published in 1967. In the three decades since, the techniques associated with vacuum ultraviolet spectroscopy have been greatly expanded. Originally published as two volumes in the serial “Experimental Methods in the Physical Sciences,” Vacuum Ultraviolet Spectroscopy combines in one paperback volume information on the many advances in vacuum ultraviolet (VUV) research. In addition, the book provides students and researchers with concise reviews of the important aspects of designing experiments in the VUV region. This is the only comprehensive treatise describing the use of synchrotron and other light sources for research, along with the new technologies in optical elements, multilayers, mirror coatings, soft x-ray zone plates, VUV detectors, interferometric spectrometers, and subjects such as spectromicroscopy, lithography, and photon-induced fluorescence. Vacuum Ultraviolet Spectroscopy is an ideal handbook both for the beginner and for the experienced researcher in any field requiring the use of VUV radiation. Key Features * Detailed review of synchrotron radiation sources including undulators and wigglers * Comprehensive outline of monochromator design * Concise review of optics theory for multilayers, spectrometers, and zone plates * Information about other important VUV sources such as laser produced plasmas and Electron Beam Ion Trap (EBIT) sources * Applications such as spectromicroscopy, lithography, and fluorescence

---

Table of contents :
Front Cover……Page 1
Vacuum Ultraviolet Spectroscopy II……Page 2
Copyright Page……Page 3
Contents……Page 4
Contributors……Page 9
1.1. Concave Grating Monochromators and Spectrometers……Page 10
1.2. Plane Grating Monochromators and Spectrometers……Page 26
References……Page 28
2.1. Introduction……Page 30
2.2. Grating Theory……Page 32
2.3. Application of Aberration Theory to the Design of an Undulator-Based SGM……Page 42
2.4. Focusing in Variable-Included-Angle Monochromators……Page 52
2.5. Diffraction Efficiency……Page 55
2.6. An Optimized Beam Line for Microscopy by Photoelectron Emission Microscopy and Micro-X-Ray Photoelectron Spectroscopy……Page 56
References……Page 61
3.1. Limitations of Uniformly Spaced Grating Instruments……Page 64
3.2. Paraxial Focusing Equations for VLS Gratings……Page 65
3.3. Harada-Style Focusing……Page 67
3.4. Hettrick-Style Focusing……Page 69
3.5. Flat Field Spectrographs and Spectrometers……Page 71
3.6. Light Path Function for a System of a Mirror and a VLS Grating……Page 74
3.7. Monochromators for Synchrotron Radiation……Page 75
References……Page 79
4.1. Introduction……Page 82
4.2. Fabry–Perot Interferometry……Page 86
4.3. Fourier Transform Spectrometry: Principal Features……Page 89
4.4. Fourier Transform Spectrometry in Practice in the VUV……Page 96
4.5. Spatially Heterodyned, Nonscanning Interferometers for FTS……Page 102
4.6. All-Reflection FT Spectrometers……Page 106
4.7. Soft X-Ray FTS by Grazing Reflection……Page 108
References……Page 114
5. I. Ionization Chambers……Page 116
5.2. Proportional Counters……Page 121
References……Page 124
6.1. Introduction……Page 126
6.2. Radiometric Standards……Page 127
6.3. Photodiode Types……Page 128
6.4. Proper Use of Photodiodes in the VUV……Page 143
References……Page 146
7.1. Photon Detection……Page 148
7.2. Amplifying Detectors……Page 157
7.3. Position Sensing Techniques……Page 171
References……Page 181
8.1. Introduction……Page 186
8.2. Primary Radiator Radiometry……Page 187
8.3. Primary Detector Radiometry……Page 188
8.4. Transfer Detector Standards for Absolute Flux Measurement……Page 195
8.5. Conclusion……Page 198
References……Page 199
9.2. Design of the Vacuum Environment……Page 202
9.3. Leak Detection……Page 209
9.4. Optics Cleaning……Page 211
References……Page 212
10.1. Integrated Circuit Fabrication and Lithographic Process……Page 214
10.2. Photoresist in Lithography……Page 215
10.3. Optical Lithography……Page 217
10.4. X-Ray Lithography……Page 223
References……Page 230
11.1. Introduction……Page 234
11.2. X-Ray Spectromicroscopy Approaches……Page 239
11.3. Applications……Page 248
11.4. Discussion……Page 265
11.5. Conclusions……Page 266
References……Page 267
12.1. Introduction……Page 272
12.2. Wavelength Measurements and Energy Levels……Page 274
12.3. Intensity Measurements and Cross Sections……Page 279
References……Page 284
13.1. Introduction……Page 288
13.2. Characteristics of the Soft X-Ray Fluorescence Spectra of Solids……Page 291
13.3. Instrumentation for SXF Spectroscopy……Page 302
13.4. Survey of Recent SXF Spectroscopy Research……Page 306
References……Page 307
Index……Page 310