CMOS Hotplate Chemical Microsensors

Markus Graf, Diego Barrettino, Henry P. Baltes, Andreas Hierlemann9783642089107, 3642089100

The book “CMOS Hotplate Chemical Microsensors” provides a comprehensive treatment of the interdisciplinary field of CMOS technology-based chemical microsensor systems, and, in particular, of microhotplate-based systems. The book is, on the one hand, targeted at scientists and engineers that are interested in getting first insights in the field of microhotplates and related chemical sensing, since all necessary fundamental knowledge is included. On the other hand, it also addresses experts in the field since it provides detailed information on all important issues related to realizing microhotplates and, specifically, microhotplate-based chemical sensors in CMOS technology.A large number of microhotplate realizations and integrated-sensor-system implementations illustrate the current state of the art and, at the same time, give an impression of the future potential of chemical microsensors in CMOS technology. Since microsensors produce “microsignals”, sensor miniaturization without sensor integration is, in many cases, prone to failure. This book will help to reveal the benefits of using integrated electronics and CMOS-technology for developing microhotplates and the corresponding chemical microsensor systems and, in particular, the advantages that result from realizing monolithically integrated sensor systems comprising transducers and associated circuitry on a single chip.