Nano- and Microelectromechanical Systems

0-8493-916-6

Table of contents :
NANO- AND MICROELECTROMECHANICAL SYSTEMS……Page 1
PREFACE……Page 5
Acknowledgments……Page 8
CONTENTS……Page 9
1.1. INTRODUCTION……Page 11
Table of Contants……Page 0
1.2. BIOLOGICAL ANALOGIES……Page 13
1.3. NANO- AND MICROELECTROMECHANICAL SYSTEMS……Page 15
1.4. APPLICATIONS OF NANO- AND MICROELECTROMECHANICAL SYSTEMS……Page 20
1.5. NANO- AND MICROELECTROMECHANICAL SYSTEMS……Page 25
1.6. INTRODUCTION TO MEMS FABRICATION, ASSEMBLING, AND PACKAGING……Page 29
2.1. NANO- AND MICROELECTROMECHANICAL SYSTEMS ARCHITECTURE……Page 33
Microelectromechanical and Nanoelectromechanical Systems……Page 38
Linkage Groups in Molecular Building Blocks……Page 42
2.2. ELECTROMAGNETICS AND ITS APPLICATION FOR NANO-AND MICROSCALE ELECTROMECHANICAL MOTION DEVICES……Page 45
Basic Foundations in Model Developments of Nano- and Microactuators in Electromagnetic Fields……Page 57
References……Page 67
2.3. CLASSICAL MECHANICS AND ITS APPLICATION……Page 68
Newtonian Mechanics: Translational Motion……Page 70
Newtonian Mechanics: Rotational Motion……Page 72
Friction Models in Electromechanical Systems……Page 80
Newtonian Mechanics: Rotational Motion……Page 84
2.3.2. Lagrange Equations of Motion……Page 86
Example 2.3.10. Mathematical Model of a Pendulum……Page 88
Example 2.3.11. Mathematical Model of a Circuit Network……Page 89
Example 2.3.12. Mathematical Model of an Electric Circuit……Page 93
Example 2.3.13. Mathematical model of a boost converter……Page 95
Example 2.3.14. Mathematical model of an electric motor……Page 99
2.3.3. Hamilton Equations of Motion……Page 103
2.4. ATOMIC STRUCTURES AND QUANTUM MECHANICS……Page 105
2.5. MOLECULAR AND NANOSTRUCTURE DYNAMICS……Page 115
2.5.1. Schrödinger Equation and Wavefunction Theory……Page 116
2.5.2. Density Functional Theory……Page 120
2.5.3. Nanostructures and Molecular Dynamics……Page 124
2.6. MOLECULAR WIRES AND MOLECULAR CIRCUITS……Page 125
References……Page 135
2.7. THERMOANALYSIS AND HEAT EQUATION……Page 136
3.1.1. Carbon Nanotubes and Nanodevices……Page 139
3.1.2. Microelectromechanical Systems and Microdevices……Page 142
Low Cost ±2 g/±10 g Dual Axis iMEMS® ® Accelerometers with Digital Output……Page 152
±5 g to±50 g, Low Noise, Low Power, Single/Dual Axis iMEMS ® Accelerometers……Page 162
3.2.1. Configurations and Structural Synthesis of Motion Nano- and Microstructures (Actuators and Sensors)……Page 176
3.2.2. Algebra of Sets……Page 183
3.3. DIRECT-CURRENT MICROMACHINES……Page 186
DC Servo Motor Controller/Driver……Page 193
OPERATING DESCRIPTION……Page 199
3.4. INDUCTION MOTORS……Page 206
3.4.1. Two-Phase Induction Motors……Page 207
Modeling Two-Phase Induction Motors Using the Lagrange Equations……Page 214
Control of Induction Motors……Page 215
S-Domain Block Diagram of Two-Phase Induction Motors……Page 218
Dynamics of Induction Motors in the Machine Variables……Page 219
Mathematical Model of Three-Phase Induction Motors in the Arbitrary Reference Frame……Page 224
Mathematical Model of Three-Phase Induction Motors in the Synchronous Reference Frame……Page 234
3.5. MICROSCALE SYNCHRONOUS MACHINES……Page 239
3.5.1. Single-Phase Reluctance Motors……Page 240
Permanent-Magnet Synchronous Machines in the Machine Variables……Page 242
The Lagrange Equations of Motion and Dynamics of Permanent-Magnet Synchronous Motors……Page 254
Three-Phase Permanent-Magnet Synchronous Generators……Page 256
Arbitrary Reference Frame……Page 258
Rotor Reference Frame……Page 260
Synchronous Reference Frame……Page 265
Brushless DC Motor Controller……Page 266
Rotor Position Decoder……Page 273
Oscillator……Page 274
Current Limit……Page 275
Thermal Shutdown……Page 276
Three Phase Motor Commutation……Page 280
Three Phase Closed Loop Controller……Page 283
Two and Four Phase Motor Commutation……Page 284
LAYOUT CONSIDERATIONS……Page 288
3.6.1. Mathematical Model in the Machine Variables……Page 289
3.6.2. Mathematical Models of Permanent-Magnet Stepper Motors in the Rotor and Synchronous Reference Frames……Page 293
Stepper Motor Driver……Page 298
Outputs……Page 301
VD……Page 302
Bias/Set……Page 303
Power Dissipation……Page 304
3. 7. NANOMACHINES: NANOMOTORS AND NANOGENERATORS……Page 306
References……Page 308
4.1. FUNDAMENTALS OF ELECTROMAGNETIC RADIATION AND ANTENNAS IN NANO- AND MICROSCALE ELECTROMECHANICAL SYSTEMS……Page 309
References……Page 321
4.2. DESIGN OF CLOSED-LOOP NANO- AND MICROELECTROMECHANICAL SYSTEMS USING THE LYAPUNOV STABILITY THEORY……Page 322
Theorem…….Page 323
Lemma…….Page 328
References……Page 336
4.3. INTRODUCTION TO INTELLIGENT CONTROL OF NANO-AND MICROELECTROMECHANICAL SYSTEMS……Page 337
References……Page 344