MEMS: Applications

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Edition: 2

Series: The MEMS Handbook

ISBN: 0849391393, 9780849391392, 9781420036558

Size: 26 MB (27333938 bytes)

Pages: 547/547

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Mohamed Gad-el-Hak0849391393, 9780849391392, 9781420036558

As our knowledge of microelectromechanical systems (MEMS) continues to grow, so does The MEMS Handbook. The field has changed so much that this Second Edition is now available in three volumes. Individually, each volume provides focused, authoritative treatment of specific areas of interest. Together, they comprise the most comprehensive collection of MEMS knowledge available, packaged in an attractive slipcase and offered at a substantial savings. This best-selling handbook is now more convenient than ever, and its coverage is unparalleled. The third volume, MEMS: Applications, offers a broad overview of current, emerging, and possible future MEMS applications. It surveys inertial sensors, micromachined pressure sensors, surface micromachined devices, microscale vacuum pumps, reactive control for skin-friction reduction, and microchannel heat sinks, among many others. Two new chapters discuss microactuators and nonlinear electrokinetic devices. This book is vital to understanding the current and possible capabilities of MEMS technologies. MEMS: Applications comprises contributions from the foremost experts in their respective specialties from around the world. Acclaimed author and expert Mohamed Gad-el-Hak has again raised the bar to set a new standard for excellence and authority in the fledgling fields of MEMS and nanotechnology.

Table of contents :
00.pdf……Page 1
01.pdf……Page 14
02.pdf……Page 19
03.pdf……Page 60
04.pdf……Page 104
05.pdf……Page 144
06.pdf……Page 181
07.pdf……Page 258
08.pdf……Page 300
09.pdf……Page 329
10.pdf……Page 348
11.pdf……Page 381
12.pdf……Page 418
13.pdf……Page 447
14.pdf……Page 498
15.pdf……Page 513

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