Nanoscale Spectroscopy and Its Applications to Semiconductor Research

S. Heun, G. Salviati, Y. Watanabe (auth.), Yoshio Watanabe, Giancarlo Salviati, Stefan Heun, Naoki Yamamoto (eds.)3540433120, 9783540433125

Fabrication technologies for nanostructured devices have be- en developed recently, and the electrical and optical pro- perties of such nanostructures are a subject of advanced re- search. This book describes the different approaches to spectroscopic microscopy, i.e., electron beam probe spec- troscopy, spectroscopic photoelectron microscopy, and scan- ning probe spectroscopy. It will be useful as a compact source of reference for the experienced researcher, taking into account at the same time the needs of postgraduate stu- dents and nonspecialist researchers by using a tutorial ap- proach throughout. Fabrication technologies for nano-structured devices have been developed recently, and the electrical and optical properties of such nonostructures are a subject of advanced research. This book describes the different approaches to spectroscopic microscopy, that is, Electron Beam Probe Spectroscopy, Spectroscopic Photoelectron Microscopy, and Scanning Probe Spectroscopy. It will be useful as a compact source of reference for the experienced reseracher,taking at the same time into account the needs of post graduate students and nonspecialist researchers by using a tutorial approach throughout.

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Table of contents :
Introduction….Pages 1-7
Spectro-microscopy by TEM-SEM….Pages 11-23
Determination of Nanosize Particle Distribution by Low Frequency Raman Scattering: Comparison to Electron Microscopy….Pages 24-36
Development of Cathodoluminescence (CL) for Semiconductor Research, Part I: TEM-CL Study of Microstructures and Defects in Semiconductor Epilayers….Pages 37-51
Development of CL for Semiconductor Research, Part II: Cathodoluminescence Study of Semiconductor Nanoparticles and Nanostructures Using Low-Electron-Beam Energies….Pages 52-60
Development of CL for Semiconductor Research, Part III: Study of Degradation Mechanisms in Compound Semiconductor-Based Devices by SEM-CL….Pages 61-73
Microcharacterization of Conformal GaAs on Si Layers by Spatially Resolved Optical Techniques….Pages 74-81
Strain Analysis in Submicron Electron Devices by Convergent Beam Electron Diffraction….Pages 82-90
Synchrotron Radiation X-ray Microscopy Based on Zone Plate Optics….Pages 93-110
Long-Term Oxidation Behaviour of Lead Sulfide Surfaces….Pages 111-120
Cross-Sectional Photoemission Spectromicroscopy of Semiconductor Heterostructures….Pages 121-130
Surface Imaging Using Electrons Excited by Metastable-Atom Impacts….Pages 131-144
Application of Photoemission Electron Microscopy to Magnetic Domain Imaging….Pages 145-156
Photoelectron Spectroscopy with a Photoemission Electron Microscope….Pages 157-171
X-ray Photoemission and Low-Energy Electron Microscope….Pages 172-179
Application of Imaging-Type Photoelectron Spectromicroscopy to Solid-State Physics….Pages 180-195
Scanning Near-Field Optical Spectroscopy of Quantum-Confined Semiconductor Nanostructures….Pages 199-209
Novel Tuning Fork Sensor for Low-Temperature Near-Field Spectroscopy….Pages 210-221
Manipulating, Reacting, and Constructing Single Molecules with a Scanning Tunneling Microscope Tip….Pages 222-230
Electron-Beam-Induced Decomposition of SiO 2 Overlay on Si in STM Nanolithography….Pages 231-240
Direct Imaging of InGaAs Quantum Dot States by Scanning Tunneling Spectroscopy….Pages 241-251
Growth and Characterization of Ge Nanostructures on Si(111)….Pages 252-262
Imaging of Zero-Dimensional States in Semiconductor Nanostructures Using Scanning Tunneling Microscopy….Pages 263-268
Electronic-Excitation-Induced Enhancement in Metallicity on HOPG and Si Surfaces: In Situ STM/STS Studies….Pages 269-277
Electronic Properties of Polycrystalline and Amorphous WO 3 Investigated with Scanning Tunnelling Spectroscopy….Pages 278-286
Probing of Electronic Transitions with Atomic-Scale Spatial Resolution in Semiconductor Quantum Well Structures….Pages 287-293
Scanning Tunneling Microscope-Induced Light Emission from Nanoscale Structures….Pages 294-304