Stephen M. Rossnagel, William D. Westwood, Jerome J. Haber0815512201, 9780815512202, 9780815517634
Handbook of plasma processing technology: fundamentals, etching, deposition, and surface interactions
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Authors: Stephen M. Rossnagel, William D. Westwood, Jerome J. Haber
Series: Materials science and process technology series
ISBN: 0815512201, 9780815512202, 9780815517634
Size: 5 MB (5224391 bytes)
Pages: 535/535
File format: djvu
Language: English
Publishing Year: 1990
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Category: Physics , Plasma Physics
Tags: Физика, Физика плазмыSign in to view hidden content.
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