Nano- and Microelectromechanical Systems Fundamentals of Nano- and Microengineering

edited by Charles L. Wilson0-8493-916-6

Table of contents :
NANO- AND MICROELECTROMECHANICAL SYSTEMS……Page 1
PREFACE……Page 5
Acknowledgments……Page 8
CONTENTS……Page 9
1.1. INTRODUCTION……Page 11
Table of Contants……Page 0
1.2. BIOLOGICAL ANALOGIES……Page 13
1.3. NANO- AND MICROELECTROMECHANICAL SYSTEMS……Page 15
1.4. APPLICATIONS OF NANO- AND MICROELECTROMECHANICAL SYSTEMS……Page 20
1.5. NANO- AND MICROELECTROMECHANICAL SYSTEMS……Page 25
1.6. INTRODUCTION TO MEMS FABRICATION, ASSEMBLING, AND PACKAGING……Page 29
2.1. NANO- AND MICROELECTROMECHANICAL SYSTEMS ARCHITECTURE……Page 33
Microelectromechanical and Nanoelectromechanical Systems……Page 38
Linkage Groups in Molecular Building Blocks……Page 42
2.2. ELECTROMAGNETICS AND ITS APPLICATION FOR NANO-AND MICROSCALE ELECTROMECHANICAL MOTION DEVICES……Page 45
Basic Foundations in Model Developments of Nano- and Microactuators in Electromagnetic Fields……Page 57
References……Page 67
2.3. CLASSICAL MECHANICS AND ITS APPLICATION……Page 68
Newtonian Mechanics: Translational Motion……Page 70
Newtonian Mechanics: Rotational Motion……Page 72
Friction Models in Electromechanical Systems……Page 80
Newtonian Mechanics: Rotational Motion……Page 84
2.3.2. Lagrange Equations of Motion……Page 86
Example 2.3.10. Mathematical Model of a Pendulum……Page 88
Example 2.3.11. Mathematical Model of a Circuit Network……Page 89
Example 2.3.12. Mathematical Model of an Electric Circuit……Page 93
Example 2.3.13. Mathematical model of a boost converter……Page 95
Example 2.3.14. Mathematical model of an electric motor……Page 99
2.3.3. Hamilton Equations of Motion……Page 103
2.4. ATOMIC STRUCTURES AND QUANTUM MECHANICS……Page 105
2.5. MOLECULAR AND NANOSTRUCTURE DYNAMICS……Page 115
2.5.1. Schrödinger Equation and Wavefunction Theory……Page 116
2.5.2. Density Functional Theory……Page 120
2.5.3. Nanostructures and Molecular Dynamics……Page 124
2.6. MOLECULAR WIRES AND MOLECULAR CIRCUITS……Page 125
References……Page 135
2.7. THERMOANALYSIS AND HEAT EQUATION……Page 136
3.1.1. Carbon Nanotubes and Nanodevices……Page 139
3.1.2. Microelectromechanical Systems and Microdevices……Page 142
Low Cost ±2 g/±10 g Dual Axis iMEMS® ® Accelerometers with Digital Output……Page 152
±5 g to±50 g, Low Noise, Low Power, Single/Dual Axis iMEMS ® Accelerometers……Page 162
3.2.1. Configurations and Structural Synthesis of Motion Nano- and Microstructures (Actuators and Sensors)……Page 176
3.2.2. Algebra of Sets……Page 183
3.3. DIRECT-CURRENT MICROMACHINES……Page 186
DC Servo Motor Controller/Driver……Page 193
OPERATING DESCRIPTION……Page 199
4.1. FUNDAMENTALS OF ELECTROMAGNETIC RADIATION AND ANTENNAS IN NANO- AND MICROSCALE ELECTROMECHANICAL SYSTEMS……Page 206
References……Page 218
4.2. DESIGN OF CLOSED-LOOP NANO- AND MICROELECTROMECHANICAL SYSTEMS USING THE LYAPUNOV STABILITY THEORY……Page 219
Theorem…….Page 220
Lemma…….Page 225
References……Page 233
4.3. INTRODUCTION TO INTELLIGENT CONTROL OF NANO-AND MICROELECTROMECHANICAL SYSTEMS……Page 234
References……Page 241