Microsystem Design

Stephen D. Senturia9780792372462, 0792372468

The goal of this book is to bring together into one accessible text the fundamentals of the many disciplines needed by today’s engineer working in the field of microelectromechanical systems (MEMS).
The subject matter is wide-ranging: microfabrication, mechanics, heat flow, electronics, noise, and dynamics of systems, with and without feedback. Because it is very difficult to enunciate principles of `good design’ in the abstract, the book is organized around a set of Case Studies that are based on real products, or, where appropriately well-documented products could not be found, on thoroughly published prototype work.
The Case Studies were selected to sample a multidimensional space: different manufacturing and fabrication methods, different device applications, and different physical effects used for transduction. The Case Study subjects are: the design and packaging of a piezoresistive pressure sensor, a capacitively-sensed accelerometer, a quartz piezoelectrically-driven and sensed rate gyroscope, two electrostatically-actuated optical projection displays, two microsystems for the amplification of DNA, and a catalytic sensor for combustible gases.
This book is used for a graduate course in `Design and Fabrication of Microelectromechanical Devices (MEMS)’ at the Massachusetts Institute of Technology. It is appropriate for textbook use by senior/graduate courses in MEMS, and will be a useful reference for the active MEMS professional.
Each chapter is supplemented with homework problems and suggested related reading. In addition, the book is supported by a web site that will include additional homework exercises, suggested design problems and related teaching materials, and software used in the textbook examples and homework problems.

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Table of contents :
Preliminaries……Page 1
Contents……Page 8
1 INTRODUCTION……Page 30
2 AN APPROACH TO MEMS DESIGN……Page 42
3 MICROFABRICATION……Page 56
4 PROCESS INTEGRATION……Page 106
5 LUMPED MODELING……Page 130
6 ENERGY-CONSERVING TRANSDUCERS……Page 152
7 DYNAMICS……Page 176
8 ELASTICITY……Page 210
9 STRUCTURES……Page 228
10 ENERGY METHODS……Page 266
11 DISSIPATION AND THE THERMAL ENERGY DOMAIN……Page 294
12 LUMPED MODELING OF DISSIPATIVE PROCESSES……Page 326
13 FLUIDS……Page 344
14 ELECTRONICS……Page 380
15 FEEDBACK SYSTEMS……Page 424
16 NOISE……Page 452
17 PACKAGING……Page 480
18 A PIEZORESISTIVE PRESSURE SENSOR……Page 496
19 A CAPACITIVE ACCELEROMETER……Page 524
20 ELECTROSTATIC PROJECTION DISPLAYS……Page 558
21 A PIEZOELECTRIC RATE GYROSCOPE……Page 588
22 DNA AMPLIFICATION……Page 632
23 A MICROBRIDGE GAS SENSOR……Page 656
Appendices……Page 678
References……Page 692
Index……Page 704