Thermal transport for applications in micro/nanomachining

Basil T. Wong, M. Pinar Mengüç9783540736059, 3540736050

Nanotechnology remains one of the most active and intriguing research and development areas. While the importance of novel devices and systems engineered at the nanoscale is steadily increasing, the success of future nanoscale applications will depend on the effective implementation of nanomachining and nanomanufacturing platforms. This book addresses the significant role played by thermal transport in electron-beam based processes, considering the various time and length scales relevant from the macroscale to the nanoscale levels. In particular, it reviews and highlights thermal transport theories related to “nanomachining,” a term loosely defined as the ability to shape, form, or build new structures at the nanoscale (1–100 nm). Beginning with an overview of nanomachining, the monograph introduces the relevant particle models based on the Boltzmann transport equation. Following general concepts, specific details for the electron-beam transport equation, radiative transfer equation, and phonon radiative transport equation are introduced. Attention is then paid to modelling of thermal transport at the nanoscale, including electron-beam propagation, the electronic thermal conduction, and the phonon transport, using various Monte Carlo methods. Simulations of different processes relevant to nanomachining are described in detail, including those for the two-temperature model and the electron-phonon hydrodynamics model. Also, parallelization strategies for the solution of the governing equations are outlined and both the hardware and software requirements are summarized. Finally the concept of molecular dynamics is introduced and its fundamentals are presented for understanding of nanomachining at the molecular level.

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Table of contents :
Cover……Page 1
Microtechnology and MEMS……Page 2
Thermal Transport for Applications in Micro/Nanomachining……Page 4
ISBN 978-3-540-73605-9……Page 5
Preface……Page 6
Contents……Page 10
List of Abbreviations……Page 14
Nomenclatures……Page 16
1 Introduction……Page 19
2 Transport Equations……Page 32
3 Modeling of Transport Equations via MC Methods……Page 74
4 Modeling of e-Beam Transport……Page 98
5 Thermal Conduction Coupled with e-Beam Transport……Page 121
6 Two-Temperature Model Coupled with e-Beam Transport……Page 151
7 Thermal Conduction with Electron Flow/Ballistic Behavior……Page 162
8 Parallel Computations for Two-Temperature Model……Page 182
9 Molecular Dynamics Simulations……Page 199
10 Concluding Remarks……Page 218
A Derivation of Matrix for the Fourier Conduction Law……Page 221
B Simplified Electron–Phonon Hydrodynamic Equations……Page 225
C Thermophysical Properties……Page 231
References……Page 233
Index……Page 241