Fundamentals of semiconductor fabrication

Gary S. May, Simon M. Sze9780471232797, 0471232793

Offers a basic, up-to-date introduction to semiconductor fabrication technology, including both the theoretical and practical aspects of all major steps in the fabrication sequencePresents comprehensive coverage of process sequencesIntroduces readers to modern simulation toolsAddresses the practical aspects of integrated circuit fabricationClearly explains basic processing theory